首页> 外文会议>Electronics Packaging Technology Conference (EPTC), 2011 IEEE 13th >Copper wire bonding process in leaded packages with zero loss in quality, capacity, scrap machine efficiency
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Copper wire bonding process in leaded packages with zero loss in quality, capacity, scrap machine efficiency

机译:引线封装中的铜线焊接工艺,质量,容量,报废和机器效率的零损失

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For the past few years, acceptance and implementation of copper wire has grown from optional to mandatory, especially after gold price increased triple for past 5 years. However, there are many companies still not able to achieve desirable performance, especially without trading off other performance indices such as quality, capacity, scrap or machine efficiency. The copper wire has two fundamental properties that can cause complication in wire bonding, it is harder than bond pad metal and it gets oxidized easily. The bonding of copper wire will require tedious optimization on all elements that described in SIPOC chart (Supplier, Input, Process, Output and Customer). Base on many comprehensive studies performed in conversion to copper wire, there were many breakthrough findings and solutions obtained. The first observation was surfacing out of many reject modes in production mode, which required a lot of improvement efforts. Normally, execution of several Six Sigma DMAIC (Define, Measure, Analyze, Improve and Control) projects could improve process defect level to very minimum, as good as gold wire bonding process. On potential quality risk, new process control method would need to be introduced in both development and production mode. New innovative control method would address all the potential risks due to bond pad metal displacement and copper oxidization. Despite that, additional bonding time was required for copper wire bonding to compensate pad damage risk. That caused increment in bonding cycle time, sometime reaching 30% loss. In regards to this, multiple approaches might be required to study every millisecond contained in the entire cycle time. At the end of study, combination of all the optimized settings could result in same throughput performance as gold wire bonding process. As for wire bonder, there were many occasions that same machine ran well with gold wire just could not produce good results after converted to copper wire. This repeated many time- until achieving breakthrough in removing mental block, copper wire bonding process required more stringent machine conditions. Every single wire bonder required upgrade to achieve new bonding conditions. Furthermore, optimization of several machine hardware designs could really make significant differences in copper wire bonding performance. Improper hardware design could result in ball shear performance differed by 50% among units on the same leadframe strip. The other observation was process parameters optimization through normal DOE (Design of Experiment) and RSM (Response Surface Methodology) might not lead to robust and stable performance across all devices. That could create a lot of doubts about the process robustness, and affecting overall progress of copper wire conversion. With multiple studies, combining leadframe design, material selection (capillary & wire), machine hardware and parameters optimization, a new process window was created. This window could be used commonly across all devices with very minimum adjustments. It also turned out to be the most robust and stable process ever found. In most of the improvement activities, when 1st and 2nd bond reached good performance, it could lead to good machine efficiency. Additional works on machine was on oxidation control, especially when BSOB (Bond Stitch on Ball) process was required. As for bond pad factor, assembly team need to work closely with wafer fabrication plants to develop robust structure and reasonable probe mark condition. A new set of design rules was required to enable implementation of copper wire bonding process in current and future products. Throughout all the improvement activities to convert from gold to copper wire bonding, the most significant factor found was mindset change. The copper wire bonding process does not only require conversion activities, but actually it requires full development efforts, just like what we have done for gold wire since 50 years ago.
机译:在过去的几年中,铜线的接受和实施已从可选性变为强制性,特别是在过去五年中金价上涨了三倍之后。但是,仍有许多公司仍无法获得理想的性能,尤其是在不折衷其他性能指标(例如质量,容量,报废或机器效率)的情况下。铜线具有两个基本特性,可导致引线键合复杂化,它比键合焊盘金属坚硬且容易被氧化。铜线的键合将需要对SIPOC图表中描述的所有元素(供应商,输入,过程,输出和客户)进行繁琐的优化。基于对转换为铜线的大量综合研究,得出了许多突破性的发现和解决方案。第一个观察结果是在生产模式中出现了许多拒绝模式,这需要大量的改进工作。通常,执行几个六西格玛DMAIC(定义,测量,分析,改进和控制)项目可以将工艺缺陷水平降低到最低程度,与金线焊工艺一样好。对于潜在的质量风险,在开发和生产模式下都需要引入新的过程控制方法。新的创新控制方法将解决由于焊盘金属移位和铜氧化而引起的所有潜在风险。尽管如此,铜线键合需要额外的键合时间以补偿焊盘损坏的风险。这导致粘结周期增加,有时损失达到30%。关于这一点,可能需要多种方法来研究整个循环时间内所包含的每毫秒。在研究结束时,所有优化设置的组合可以产生与金线键合工艺相同的生产能力。至于引线键合机,在很多情况下,同一台机器用金线运行得很好,而转换成铜线后却无法产生良好的效果。此过程重复了许多时间,直到在消除金属块方面取得突破为止,铜线键合工艺需要更严格的机器条件。每个单线键合机都需要升级以达到新的键合条件。此外,对几种机器硬件设计的优化可能确实会在铜线键合性能方面产生重大差异。不正确的硬件设计可能导致同一引线框架带上的单元之间的滚珠剪切性能相差50%。另一个观察结果是通过正常的DOE(实验设计)和RSM(响应表面方法学)优化工艺参数可能不会导致所有设备的鲁棒和稳定的性能。这可能会引起人们对工艺鲁棒性的怀疑,并影响到铜线转换的总体进度。经过多次研究,结合了引线框架设计,材料选择(毛细管和线材),机器硬件和参数优化,创建了一个新的过程窗口。只需很少的调整,即可在所有设备上共同使用此窗口。事实证明,它是有史以来最强大,最稳定的过程。在大多数改进活动中,当第一键和第二键达到良好性能时,可以提高机器效率。机器上的其他工作涉及氧化控制,尤其是在需要BSOB(球上缝合)工艺时。至于焊盘系数,组装团队需要与晶圆制造厂紧密合作,以开发出坚固的结构和合理的探针标记条件。需要一套新的设计规则,才能在当前和将来的产品中实施铜线键合工艺。在从金线到铜线键合的所有改进活动中,发现的最重要因素是心态改变。铜线键合过程不仅需要转换活动,而且实际上还需要充分的开发工作,就像我们50年前对金线所做的一样。

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