Model and measurement of resist heating effect in EBL (Poster Paper)

机译：EBL中的抗蚀剂加热效果的模型和测量（海报纸）

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Abstract: Measurements of dose characteristics of PMMA were performed with various resist temperatures. The quantitative data shows sensitivity changes with the temperature increase. The model of resist heating effect is presented and a possible technique to correct distortions due to resist heating is discussed.!4

机译：摘要：在不同的抗蚀剂温度下进行了PMMA剂量特性的测量。定量数据显示灵敏度随温度升高而变化。给出了抗蚀剂加热效果的模型，并讨论了一种纠正由于抗蚀剂加热引起的变形的可行技术。！4

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《Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II》|1992年|p.93-97|共5页
会议地点 San Jose CA(US)
作者
Sergei V. Babin; Institute of Microelectronics Technology; Moscow; Russia; Ivan Kostic; Institute of Technical Cybernetics; Bratislava; Czechoslovakia; A.A. Svintsov; Institute of Microelectronics Technology; Chernogolovka; Moscow District; Russia.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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4. Model and measurement of resist heating effect in EBL (Poster Paper) [C] . Sergei V. Babin, Ivan Kostic, A.A. Svintsov Conference on electron-beam, x-ray, and lon-beam submicrometer lithographies for manufacturing . 1992

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Model and measurement of resist heating effect in EBL (Poster Paper)

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