PbTe - PbSe Superlattice Formation by Electrochemical Atomic Layer Deposition

摘要

We report on an investigation of the formation of PbTe - PbSe superlattices using electrochemical atomic layer deposition (ALD). Characterization involves glancing incident X-ray diffraction, using a Scintag PAD V equipped with a thin film attachment, and using Cu Kα radiation. This report describes changes in the X-ray diffraction pattern resulting from adjustment of the superlattice period. The period is defined by the number of ALD cycles of PbTe and PbSe, performed for the deposition. Adjustment of the period results in expected changes in the positions of satellite peaks in the XRD pattern, adjacent to the (111) peak. Deposits were found to be essentially stoichiometric, as determined using electron probe micro analysis. In addition, the ratio of PbTe to PbSe cycles followed the relative numbers of cycles