A high-precision photoelectric autocollimator based on PSD

摘要

According to the present situation that the accuracy of most autocollimator measurement is not high enough, and the measurement is limited to one-dimensional static style, we design a kind of high-precision photoelectric self-collimation measurement system based on position sensitive detector (PSD). In this system we use a return-type optical path to reduce equipment size, and neural network for the non-linear correction of PSD. When the distance is 10m, it can achieve the measurement range ± 5', full-range measurement error of less than 0.2', measurement resolution of less than 0.01' and other technical indexes.