Ultraprecision XY stage with millimetre travel range using leaf-spring mechanism and voice-coil motor

机译：采用板簧机构和音圈电机的超精密XY工作台，行程范围为毫米

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1. Ultra-precision compact XY positioning mechanism with 10nm resolution over 2mm travel range is realized using leaf spring guide and VCM actuator. Its first resonant frequencies are 26.68Hz for x-axis and 22.79Hz for y-axis. 2. Modeling is verified via experiment and we assure the deviation less than 10%.

机译：1.使用板簧导轨和VCM执行器，实现了在2mm行程范围内具有10nm分辨率的超精密紧凑型XY定位机构。它的第一个共振频率对于x轴是26.68Hz，对于y轴是22.79Hz。 2.建模通过实验验证，我们保证偏差小于10％。

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来源
《The Eighteenth Annual Meeting the American Society for Precision Engineering; Oct 26-31, 2003; Portland, Oregon》|2003年|p.183-186|共4页
会议地点 Portland OR(US);Portland OR(US)
作者
D. W. Kang; D. M. Kim; K. H. Kim; J. Y. Shim; D. G. Gweon;
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作者单位

Nano-Opto-Mechatronics Lab., Dept. of Mechanical Eng., KAIST 373-1 Guseong-Dong, Yuseong-Gu, Daejeon, 305-701, Korea;

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原文格式 PDF
正文语种 eng
中图分类矿业工程;
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Ultraprecision XY stage with millimetre travel range using leaf-spring mechanism and voice-coil motor

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