Design and modeling of a novel monolithic parallel XY stage with centimeters travel range:

摘要

Since most of XY positioning stages with large travel range proposed by former researchers suffer from loose structure and low out-of-plane payload, this article presents a novel monolithic parallel XY stage based on spatial prismatic–prismatic joints with centimeters travel range, compact size, and high out-of-plane payload capacity. The novel parallel linear compliant mechanism of the stage is composed of four spatial prismatic–prismatic joints, which is two compound leaf spring parallelograms serially connected in cubical space to obtain large travel, compact size, and high out-of-plane payload capacity simultaneously. The theoretical static stiffness and resonant frequencies are obtained by matrix structural analysis. As a case study, a reified stage is presented and discussed in detail. Finally, theoretical models are comprehensively compared with finite element analysis models. It is shown that the stage in the case study has the following merits: large travel range up to 20?×?20?mm2, high-area rati...