Ultraprecision XY stage with millimetre travel range using leaf-spring mechanism and voice-coil motor

摘要

1. Ultra-precision compact XY positioning mechanism with 10nm resolution over 2mm travel range is realized using leaf spring guide and VCM actuator. Its first resonant frequencies are 26.68Hz for x-axis and 22.79Hz for y-axis. 2. Modeling is verified via experiment and we assure the deviation less than 10%.