TRACKING CONTROLLER FOR A PIEZOWORM? STAGE

摘要

In this paper, a closed-loop tracking controller is described that expands the application of the piezoworm stage. A dynamic model of the piezoworm is presented complete with a rule-based friction model to accurately capture the clamp behavior. This dynamic model is used to assess different closed loop controllers for tracking performance. It is determined that a PID controller would offer good performance when the motor is subject to step and sinusoidal signals and state feedback control did not lead to improved performance when compared to the PID performance.