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Underfill Design for Low-K Dielectrics Lead Free Applications

机译:用于低介电常数和无铅应用的底部填充设计

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摘要

As technology nodes progress to 32/28nm and beyondrnunderfill materials are presented with the significantlyrnchallenging task of maintaining bump protection whilernensuring ultra low-K dielectric (ULK/ELK) integrity.rnThis challenge is further complicated by the trend towardrnRoHS compliancy (lead-free) and an ever increasing diernsize. Through extensive research and testing, severalrnspecifically formulated underfill materials wererndetermined acceptable solutions for these complex issues.rnAs technology nodes progress to smaller processrngenerations a high stress concentration is seen at therndielectric layer during thermal cycling. This stress is arntypical result of a high glass transition temperature (Tg) /rnhigh strength material that often leads to a crackingrnfailure mode of the thin dielectric layer. Too low of a Tgrnpresents a high stress concentration on the bumps whichrnonce again constitutes failure, this time, however, therncrack is typically seen at the bump location. This highrnstress concentration seen at the bumps is more significantrnwhen lead free bumps are considered due to their inherentrnfragile nature. Underfill materials must now bernspecifically formulated and optimized to solve thesernfailure modes for a large variation of package types. Thisrnpaper will discuss solutions to typical failure modesrncurrently seen in reliability testing of present and futurerntechnologies. Keywords: flip chip, underfill, low-K dielectric, leadrnfree.
机译:随着技术节点发展到32 / 28nm并超越了底层填充材料的局限性,这是保持凸点保护同时确保超低K介电质(ULK / ELK)完整性的重大挑战。随着RoHS兼容(无铅)和不断扩大的规模。通过广泛的研究和测试,确定了几种专门配制的底部填充材料来解决这些复杂的问题。随着技术节点发展为更小的工艺一代,热循环期间介电层上会出现较高的应力集中。这种应力是高玻璃化转变温度(Tg)/高强度材料的典型结果,该材料通常会导致薄介电层的开裂-失效模式。 Tgrn太低表示凸点上的应力集中很高,再次造成故障,这是一次失败,但是,这一次,通常在凸点位置看到裂纹。当考虑到无铅凸块的内在易碎性时,在凸块处看到的这种高应力集中更为显着。现在必须对底部填充材料进行特殊配方和优化,以解决各种包装类型的失效模式。本文将讨论当前和未来技术的可靠性测试中常见的典型故障模式的解决方案。关键字:倒装芯片,底部填充,低K电介质,无铅。

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  • 来源
    《Device packaging 2010》|2010年|p.1-3|共3页
  • 会议地点 Scottsdale/Fountain Hills AZ(US)
  • 作者单位

    schmaltz@namics-usa.com - Sales Manager at NAMICS Technologies 2055 Gateway Pl Suite 480, San Jose, CA 95110;

    rnyukinari@namics.co.jp - Technical Support Manager at NAMICS Technologies 2055 Gateway Pl Suite 480, San Jose, CA 95110;

    rnkohara@namics.co.jp – Senior Insulating Materials Scientist at NAMICS Corp.2055 Gateway Pl Suite 480, San Jose, CA 95110;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 制造工艺;
  • 关键词

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