NanoElectroMechanicalSystems (NEMS): The challenge of combining microsystems and nanotechnology for new market opportunities

摘要

The success of the microelectronic industry in scaling down the critical dimensions of integrated circuits is impressive. It is tempting to think that the same paradigm applies for Micro-ElectroMechanical-Systems (or MEMS). Smaller MEMS will potentially reduce the system dimensions and lower its cost. Furthermore, owing to the small size of the moving part, the resonant frequency and thus the response time of the device are improved, the energy consumption is lowered and the sensitivity to an adsorbed mass is increased.