School of Electronic and Computer Engineering Shenzhen Graduate School, Peking University Shenzhen 518055, Guangdong, China;
School of Electronic and Computer Engineering Shenzhen Graduate School, Peking University Shenzhen 518055, Guangdong, China;
School of Electronic and Computer Engineering Shenzhen Graduate School, Peking University Shenzhen 518055, Guangdong, China;
self-aligned multiple patterning (SAMP); self-aligned quadruple patterning (SAQP); self-aligned sextuple patterning (SASP); layout decomposition; coloring;
机译:防重叠自对准双图案(SADP)布局分解的多项式时间精确算法
机译:使用自对准多个图案和拼接技术的随机二维布局分解和合成
机译:低于10nm节点设计的二维随机金属的自对准双图案布局分解
机译:突破一维布局限制并重新获得二维设计自由第一部分:混合光学和自对准多重图案的二维布局分解和拼接技术
机译:三重图案光刻的版图分解。
机译:基于遗传算法的垂直分解多序列比对
机译:一种用于三重/多重图案布局分解的新方法
机译:遗传算法在模式理论中的功能分解