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Focusing hard x-rays with large kinoform lenses of mm size

机译:用毫米大小的大型Kinoform透镜聚焦硬X射线

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This report describes the optimization, first experimental data and the performance outlook for a special refractive lens for the focusing of x-rays. The lens was obtained by applying the strategy of Fresnel to lighten a lens by removing efficiently optically passive material. This strategy was applied to objects, which were produced by deep x-ray lithography and which can thus be shaped in only one dimension. Consequently this class of lenses can focus in only one dimension. While in the normal Fresnel lenses as much material as possible is removed, in the present lens the remaining segments were kept as large as possible, in order to finally obtain a rigid and deep structure. The resultant structure is composed of small prisms of almost identical shape, which are combined such that the final lens looks like an hour glass, i.e. two large prisms touch each other at one of their tips. Such a lens has better transmission than a normal refractive lens of equal focal length. And even though it has worse transmission than the normal Fresnel lenses, it could be produced with an unprecedented geometrical aperture of 2.6 mm for 8 keV photon energy. The uniformly etched structure depth was found to be at least 0.4 mm, over which the lens can focus free of aberrations. A lens with focal length 2.183 m was found to provide after very rapid alignment a focus size of 2.8 μm, while slightly better 1.73 μm were ideally expected.
机译:该报告介绍了用于聚焦X射线的特殊折射透镜的优化,第一批实验数据和性能前景。通过应用菲涅耳(Fresnel)策略通过有效去除光学无源材料来减轻镜片重量,从而获得了镜片。该策略适用于通过深X射线光刻技术生产的对象,因此只能在一个维度上成形。因此,此类镜头只能在一个维度上聚焦。在普通菲涅尔透镜中,要除去尽可能多的材料,而在本发明的透镜中,将其余部分保持尽可能大,以便最终获得刚性和较深的结构。最终的结构由形状几乎相同的小棱镜组成,这些小棱镜被组合在一起,使得最终的透镜看起来像沙漏,即两个大棱镜在其尖端之一相互接触。这种透镜具有比等焦距的普通折射透镜更好的透射率。尽管它的透射率比普通的菲涅耳透镜差,但对于8 keV光子能量,它仍可以制造出前所未有的2.6 mm几何孔径。发现均匀蚀刻的结构深度为至少0.4mm,在该深度上透镜可以聚焦而没有像差。发现焦距为2.183 m的透镜在非常快速对准后可提供2.8μm的焦距,而理想情况下可望获得略佳的1.73μm。

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