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Investigation of the effect of thermal history on ring-OSF formation in CZ-silicon crystals

机译:热历史对CZ-硅晶体中环OSF形成的影响的研究

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R-OSF are known to appear in CZ silicon crystals, but their nuclei are not observable in the asgrown state, and as-such have been difficult to characterize. Using a crystal grown with modifications inits pulling rate, this paper used lifetime in particular, coupled with the OPP, to investigate as-grown OSF nuclei size and density distribution and to discuss further how R-OSF are formed and how their formation interacts with that of other defects. It was found that faster cooling in the temperature range where large voids are formed and how their formation interacts with that of other defects. It was found that faster cooling in the temperature range where large voids are formed (1070 deg-970 deg), which resulted in a larger residual vacancy concentration, caused the OSF ring to become wider, and teh OSF-nuclei to become larger than normal in this area, while fast cooling in the temperature range where OSF are formed (990 deg-900 deg) is thought to suppress their formation, which thus resulted in smaller OSF-nuclei.
机译:众所周知,R-OSF出现在CZ硅晶体中,但是在成核状态下无法观察到它们的核,因此很难对其进行表征。本文使用的晶体生长具有提高的拉动速率,本文特别将寿命与OPP结合使用,研究OSF生长的核尺寸和密度分布,并进一步讨论R-OSF的形成方式以及它们如何与之相互作用。其他缺陷。发现在形成大空隙以及它们的形成如何与其他缺陷的相互作用的温度范围内更快地冷却。发现在形成大空隙的温度范围(1070度至970度)中更快的冷却,这导致更大的残余空位浓度,导致OSF环变宽,并且OSF核变得比正常大。在该区域中,虽然认为在形成OSF的温度范围(990 deg-900 deg)中进行快速冷却可以抑制其形成,从而导致OSF核较小。

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