Terahertz quantum cascade laser integration with on-chip micromachined rectangular waveguides

摘要

Integration of THz quantum cascade lasers (QCLs) with single-mode 75 μm × 37 μm rectangular waveguide components, including horn antennas, couplers, and bends, for operation at 3 THz has been designed and fabricated using thick gold micromachining. Measurements on the isolated waveguide components exhibit fairly low loss and integration with THz QCLs has been demonstrated. This technology offers the potential for realizing miniature integrated systems operating in the 3 THz frequency range.