The catalytic hydrogenation of chlorosilanes - the crucial point of production of electronic-grade silicon

摘要

The hydrodechlorination of SiCl_4 into HSiCl_3 in presence of a transition metal catalyst represents an industrial and ecological demand for effective resource management in silicon technology. By application of a variety of methods and techniques, the present work is able to give detailed insight into the mechanism of in situ silicide catalyst formation and kinetics of HSiCl_3 formation. The results reveal the importance of adsorbed H_2 and HCl in the silicide formation and in the catalytic reaction with participation of intermediary formed silylenoide species on the silicide catalyst surface.