Recent Progress in electron beam mastering for 100Gb/in~2 and beyond

摘要

We improved the electron beam recorder with a differential pumping head for higher density discs and mass production. The beam diameters were improved by exchanging the aperture size of the objective lens and beam stability were also improved by adding a sound proof case. As for the performance of the improved electron beam recorder, we showed that a 104Gb/in~2 (150GB capacity/layer) density disc with EFM plus modulation codes can be fabricated. We also improved the pit shape uniformity and a margin of the process by introducing the appropriate write strategy that is simulated by the Monte Carlo simulation to the recording pulses.