Thick PZT film / stainless steel actuator fabricated by aerosol deposition method: fatigue property

摘要

Using Aerosol Deposition Method it is possible directly deposited PZT l~100-um-thick films on different kinds of substrates. The mechanical, and piezoelectric properties of such piezoelectric films allowed applying it to the microactuator fabrication. In this presentation, 10-jim-thick PZT film was directly deposited on the stainless steel. After annealing and poling of PZT, the fatigue of such actuator was investigated applied bipolar electrical field of 30 kV/cm keeping actuator temperature at 100 ℃. After 109 cycles changing in the vibration amplitude was not observed, as well as the actuator tip's shift. Applications of such actuator for preside positioning of hard disk drive are discussed.