首页> 外文会议>Conference on Micromachining Technology for Micro-Optics 20 September 2000 Santa Clara, USA >Fabrication of Refractive Microlens Array by Etching Ammonium Dichromate Gelatin (ADG) with Enzyme
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Fabrication of Refractive Microlens Array by Etching Ammonium Dichromate Gelatin (ADG) with Enzyme

机译:酶刻蚀重铬酸铵明胶(ADG)制备折射微透镜阵列

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摘要

A new method has been developed to fabricate refractive microlens by etching ammonium dichromate gelatin (ADG) with enzyme solution. Unlike previous methods which are used to fabricate refractive mcirolens wiht photoresist, the process of fabricating microlens by etching ADG with enzyme solution doesn't require te use of expensive euqipment, and it isn't sophisticated and time consuming. The light exposes ADG through a high contrast binary mask, then the exposed parts of ADG genrate cross-linking reaction. Usually, the relief achieved by water developing is very shallow (
机译:通过用酶溶液蚀刻重铬酸铵明胶(ADG),已开发出一种新的方法来制造折射微透镜。与以前的用于通过光刻胶制造折射微透镜的方法不同,通过用酶溶液蚀刻ADG来制造微透镜的过程不需要使用昂贵的设备,并且它既复杂又费时。光线通过高对比度的二元掩模曝光ADG,然后ADG的曝光部分产生交联反应。通常,当使用非再硬化凝胶时,通过水显影获得的浮雕非常浅(

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