One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film

摘要

Achromatic spherical microlens array is fabricated successfully on gelatin film by combining the highly efficient techniques of one-step gray-tone photolithography and novel enzyme etched silver-halide-sen-sitized gelatin. The microlens array has spherically continuous surface relief profile, 100% fill factor and high energy efficiency, and is ready for UV-vis-NIR broadband applications. The gray-tone mask design, reflection-type projection photolithography setup, enzyme etching processing, and the characterization of fabricated 11×11 gelatin microlens array, are presented in this paper.