首页> 外文会议>Conference on MEMS/MOEMS Technologies and Applications, Oct 17-18, 2002, Shanghai, China >A Novel Structure of passive ring waveguide resonator on silicon substrate
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A Novel Structure of passive ring waveguide resonator on silicon substrate

机译:硅衬底上无源环形波导谐振器的新型结构

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摘要

A novel optical waveguide rectangular ring resonator is designed and fabricated in silicon-on-insulator (SOI). The resonator is composed of four straight waveguides connected by four 90°directional change-turning mirrors. This merged structure allows compact size and low loss. The input and output waveguides to couple energy into and out from the resonator are also designed and optimized in this work.
机译:在绝缘体上硅(SOI)中设计并制造了一种新型的光波导矩形环谐振器。谐振器由四个直的波导组成,这些直的波导通过四个90°定向转向镜连接。这种合并的结构允许紧凑的尺寸和低损耗。在这项工作中,还设计并优化了将能量耦合到谐振器和从谐振器输出的输入和输出波导。

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