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Conference on MEMS/MOEMS technologies and applications

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1.Study on the Silicon Micro-mechanical Accelerometer Using an Optical Fiber

机译：光纤研究硅微机械加速度计
- 作者：Tongyu Wang;Shuren Zhang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- accelerometer;
- optical-fiber;
- micro-mechaning;
2.A Micromechanical Variable Optical Attenuator based on EDM micromachining

机译：基于EDM微机械的微机械可变光学衰减器
- 作者：Zhonghui Cao;Ye Yuan;Junfeng Bao;X. Wu
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- optical attenuators;
- MEMS;
- EDM (electrical discharge machining);
- WDM networks;
3.A low voltage micromachining based scalable optical switch

机译：基于低压微机密的可伸缩光开关
- 作者：Junfeng Bao;Ye Yuan;Zhonghui Cao;X. Wu
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- MEMS;
- optical switch;
- EDM (electrical discharge machining);
- fiber optic communication;
4.The designing, fabrication and test of a MEMS colloid thruster

机译：MEMS胶体推进器的设计，制作和测试
- 作者：Zhaoying Zhou;Jijun Xiong;Xiongying Ye;Xiaohao Wang;Yanyin Feng
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- colloid thruster;
- micro thruster;
- MEMS;
- micro thrust;
- emitter;
- array;
5.Error Analysis of Micro Strain Gauge with a Mechanical Amplifier

机译：机械放大器微应变仪的误差分析
- 作者：Zutao Liu;Qing-An Huang;Yanfeng Jiang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- error analysis;
- residual strain;
- microstructure;
- residual stress;
- measurement;
6.Optical-electromechanical performance of MEMS tilting micro-mirrors for AON communication system

机译：用于AON通信系统的MEMS倾斜微镜的光学机电性能
- 作者：Dachao Li;Wengang Wu;Shijiu Jin;Jinjie Shi;Yilong Hao
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- MEMS;
- tilting micro-mirrors;
- optical properties;
- electromechanical performance;
7.Optimal design for the alignment of single mode fibres using thermal microactuators

机译：使用热微致动器对单模纤维对准的最佳设计
- 作者：J Yao;D Uttamchandani
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- thermal microactuator;
- fibre alignment;
- coupling loss;
8.Three degrees of freedom precision stage

机译：三度自由精度阶段
- 作者：Yingfei Wu;Zhaoying Zhou
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
9.Fabrication of integrated microlens array mold/ mold insert for mass production

机译：用于批量生产的集成微透镜阵列模具/模具插入件的制造
- 作者：Ruey Fang Shyu;Feng-Tsai Weng;Cheng-Tang Pan;Hsiharng Yang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- microlens array;
- molding technology;
- thermal reflow;
- micro-optics;
10.Micro-fabrication of color filter for liquid crystal display by inkjet-based method

机译：基于喷墨的方法微晶显示器微滤清器微织物
- 作者：Chin-Tai Chenauthor_name/
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- color filter;
- liquid crystal display;
- ink-jet;
- micro-fabrication;
- surface tension;
11.Micro-translation-table for near-field data storage using inverted-scratch-drive-actuators

机译：用于近场数据存储的微型翻译表使用倒置式驱动驱动驱动器执行器
- 作者：Yoshiaki Kanamori;Hiroto Yahagi;Minoru Sasaki;Takahito Ono;Kazuhiro Hane
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- scratch drive actuator;
- micro-translation-table;
- micromachining;
- optical storage;
12.An equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy

机译：F-I类比中的光束结构机电系统的等效电路Macromodel
- 作者：Hua Rong;QingAn Huang;Weihua Li
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- modal analysis;
- lagrange's equation;
- equivalent circuit macromodel;
- F-I analogy;
13.Research on the design-optimization and fabrication process of MEMS micro magnetometer based on tunneling effect

机译：基于隧道效应的MEMS微磁力计设计优化和制造过程研究
- 作者：Zhaoying Zhou;Xing Yang;Junhua Zhu;Xiongying Ye
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- magnetometer;
- tunneling effect;
- MEMS;
14.Subwavelength antireflection structure for optical detector fabricated by fast atom beam etching

机译：用于快速原子光束蚀刻制造的光学检测器的亚波长抗反射结构
- 作者：Yoshiaki Kanamori;Masahiro Ishimori;Kazuhiro Hane
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- subwavelength grating;
- antireflection;
- fast atom beam;
- rigorous coupled-wave analysis;
- photodiode;
15.Capacitive RF MEMS switch with composite beam

机译：具有复合梁的电容式RF MEMS开关
- 作者：Min MIAO;Zhiyong XIAO;Guoying WU;Yilong HAO;Haixia ZHANG
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- MEMS;
- radio frequency;
- switch;
- composite beam;
- phase shifter;
- microwave;
- millimeter wave;
16.Nano-stepper driven optical shutter for applications in free-space micro-optics

机译：用于自由空间微光学应用的纳米步进驱动光学快门
- 作者：Justyna Zawadzka;Lijie Li;Anartz Unamuno;Deepak Uttamchandani
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- attenuator;
- nano-stepper;
- micro-mirror;
- collimation;
- nano-positioning;
17.Microfluidics related researches and applications

机译：Microfluidics相关的研究和应用
- 作者：Zhaoying Zhou;Yanying Feng
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- microfluidic;
- MEMS;
- scaling effect;
- coupled-field;
18.Optical MEMS for High-End Micro-Spectrometers

机译：高端微光谱仪的光学MEMS
- 作者：Rainer Riesenberg;Andreas Wuttig;Guenter Nitzsche;Bernd Haraisch
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- optical sensor;
- spectrophotometer;
- MEMS;
- subpixel analysis;
- spatial light modulator;
- slit mask;
19.Optimization and Simulation of the Surface Acoustic Wave Motor

机译：表面声波电机的优化和仿真
- 作者：Xiquan Cui;Lan Wu;Haijun Zhang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- surface acoustic wave motor;
- micro actuator;
- MEMS;
- position control;
20.MEMS Microrotor Technology and Aerodynamics for a Hovering Micro Air Vehicle

机译：MEMS MICROROR技术和悬停微空气车辆的空气动力学
- 作者：Yang Liu;Jiapin Chen;Yongli Xiao
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- MEMS;
- hovering MAVs;
- four-rotor micro rotorcraft;
- aerodynamics;
- microrotor;
21.Design and simulation of integrated CMOS-compatible capacitive absolute pressure-sensing Microsystems

机译：集成CMOS兼容电容绝对压力传感微系统的设计与仿真
- 作者：Min-Xin Zhou;Qing-An Huang;Ming Qin
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- microsystem;
- CMOS-compatible;
- integrated absolute pressure sensors;
22.Designing a diffractive optical element used as a ring-beam convertor to control the wave-front propagation in a three-dimensional space

机译：设计用作环形束转换器的衍射光学元件以控制三维空间中的波前传播
- 作者：Lue Junfeng;Zhang Jingjuan;Zhang Yan;SiTu Guohai
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
23.Comparison of theoretical and experimental determination of the flexing of scratch drive actuator plates

机译：划痕驱动致动器板弯曲理论与实验测定的比较
- 作者：Lijie Li;J Gordon Brown;Deepak Uttamchandani
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- scratch drive actuator;
- contact;
- non-contact;
- simulation;
24.Micro Gripper for Handling and Assembly in MEMS produced by SU8-Technology

机译：用于处理和组装的微夹具，由SU8-Technology生产的MEMS
- 作者：Dragan Petrovic;Gordana Popovic;Tatjana Petrovic;Andreas Schneider;Ejaz Huq;Helmut Detter;Friedrich Franek
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- handling;
- assembly;
- gripper;
- MEMS;
- SU8;
25.Intelligent Vision Systems

机译：智能视觉系统
- 作者：Natalie Clark;Upendra N. Singh
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
26.Design and Simulation of a bulk micromachined relay with lateral contact

机译：横向接触的散装微机械继电器的设计与仿真
- 作者：Zhenchuan Yang;Zhihong Li;Yilong Hao;Guoying Wu
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- micro electromechanical systems (MEMS);
- relay;
- coupled analysis;
27.Fabrication of 1.3 μm Si-based MEMS tunable optical filter

机译：基于1.3μm的MEMS可调滤光片的制造
- 作者：Y. H. Zuo;C. J. Huang;B. W. Cheng;R. W. Mao;L. P. Luo;J. H. Gao;Y. X. Bai;L. Ch. Wang;J. Zh. Yu;Q. M. Wang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- fabry-perot;
- tunable filter;
- surface micromaching;
28.A Novel Structure of passive ring waveguide resonator on silicon substrate

机译：硅衬底上的无源环波导谐振器的新结构
- 作者：Wei Guo;Huilian Ma;Zhonghe Jin;Yanzhe Tang;Yuelin Wang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- ring resonator;
- optical gyroscope;
- optical waveguides;
- silicon-on-insulator;
29.Fabrication of 13μm Si-based MEMS tunable optical filter

机译：基于13μm的MEMS可调光学滤光片制备
- 作者：Y. H. Zuo;C. J. Huang;B. W. Cheng;R. W. Mao;L. P. Luo;J. H. Gao;Y. X. Bai;L. Ch. Wang;J. Zh. Yu;Q. M. Wang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- Fabry-Perot;
- tunable filter;
- surface micromaching;
30.Excimer Laser Micromachining Technology in Biochip

机译：Biochip中的准分子激光微加工技术
- 作者：Tao Chen;Jimin Chen;Yu Zhang;Bohua Ying;Tao Jing;Tiechuan Zuo
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- Excimer laser;
- micromachining technology;
- biochip;
31.Reduction of the thermal nonreciprocity in fiber-optic Sagnac interferometer via hybrid winding pattern

机译：通过混合绕组图案减少光纤锯齿干涉仪中的热非渗透性
- 作者：Xuhan Dai;Xiaolin Zhao;Bingchu Cai
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
32.Silicon MicroChannel Array Based on MEMS Process

机译：基于MEMS过程的硅微通道阵列
- 作者：Qingduo Duanmu;Ye Li;Delong Jiang;Yanjun Gao;Lichen Fu;Jingquan Tian
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- silicon;
- microchannel;
- arrays;
- electrochemical etching;
- aspect ratio;
33.A Novel Device of Passive and Fixed Alignment of Optical Fiber Using SU-8 Photoresist

机译：使用SU-8光致抗蚀剂的光纤被动和固定对准的新装置
- 作者：Liu Jing-quan;Cai Bing-chu;Zhu Jun;Chen Di;Li Yigui;Zhang Jiliang;Ding Gui-pu;Zhao Xiao-lin;Yang Chun-sheng
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- SU-8 resist;
- UV-LIGA;
- optical fiber;
- passive and fixed alignment;
- MOEMS;
34.Fabrication of reflective micromirror in micromechanical optical switches

机译：微机械光学开关中反射微镜的制造
- 作者：Wei Dong;Weiyou Chen;Han Yang;Long Zhang;Ping Ji;Wenbin Guo;Caixia Liu;Xindong Zhang;Dongming Sun;Cuiping Jia;Jianxuan Pan
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- optical switches;
- micromirror;
- surface roughness;
- reflectivity;
35.A new test structure for measuring thermal conductivity of polysilicon thin films

机译：一种测量多晶硅薄膜导热率的新试验结构
- 作者：Gaobin Xu;Qing-An Huang;Yanfeng Jiang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- thermal conductivity;
- surface micromachining process;
- test structure;
- polysilicon thin films;
36.Research on the important theory of array microjet based on MEMS

机译：基于MEMS的阵列微喷射的重要理论研究
- 作者：Songmei Yuan;Zhaoying Zhou;Guohui Wang;Changgeng Liu
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- microjet;
- MEMS;
- theory;
37.Laser fabrication technology for micro-machine

机译：微机器激光制造技术
- 作者：Jimin Chen;Tao Chen;Xubao Wang;Tiechuan Zuo
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- micro-machine laser micro-fabrication micro-meter nano powder;
38.Laterally Driven Variable Capacitor for Displacement Measurement of Microactuators

机译：微致动器的横向驱动可变电容器的偏移测量
- 作者：Qingquan Liu;Qing-An Huang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- variable capacitors;
- microactuators;
- MEMS;
- surface micromachining;
- finite element analysis;
- capacitance sensors;
- measurement;
- MEMDAC;
39.Optimum Design of Levitating Coil and Stability Coils in the Micromachined Gyroscope of Electromagnetic Levitated Rotor

机译：电磁悬浮转子微机械陀螺仪中悬浮线圈和稳定线圈的优化设计
- 作者：Xiaosheng Wu;Wenyuan Chen;Weiping Zhang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- micromachined gyroscope;
- electromagnetic levitation;
- optimum design;
- coil;
- finite element;
40.Excimer Laser Micromachining Technology in Biochip

机译：Biochip中的准分子激光微加工技术
- 作者：Tao Chen;Jimin Chen;Yu Zhang;Bohua Ying;Tao Jing;Tiechuan Zuo
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- excimer laser;
- micromachining technology;
- biochip;
41.An error compensation technology to deal with axis-misalignment of multi-MEMS-sensors

机译：处理多MEMS传感器的轴不对准的错误补偿技术
- 作者：Rong Zhu;Zhaoying Zhou
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- micro electro-mechanical system (MEMS);
- axis-misalignment;
- multi-sensors;
- optical alignment;
- error compensation;
42.Wafer level packaging for gyroscope by Au/Si eutectic bonding

机译：Au / Si共晶键合的陀螺仪锁定术
- 作者：Yong Ruan;DaCheng Zhang;ZhenChuan Yang;Xiang Wang;Xiaomei Yu
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- wafer level packaging;
- anodic bonding;
- Au/Si eutectic bonding;
- MEMS gyroscope;
- MEMS pressure sensor;
43.The Pd/Ni Bilayer Electrochemical Microactuator

机译：PD / Ni双层电化学微致动器
- 作者：Yao Jinyuan;Ding Guifu;Cao Ying;Yang Chunsheng;Shen Tianhui
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- an electrochemical microactuator;
- Pd/Ni bimorph electrodes;
- surface micromachining;
44.Development of micro-vision system for manipulation robot

机译：操纵机器人微视力系统的开发
- 作者：Lining Sun;Liguo Chen;Weibin Rong
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- micromanipulation;
- robot;
- micro-vision;
- micro-assembly;
- stereoscopic microscope;
45.Simulation and optimization of dynamic passive valve micropump

机译：动态无源阀微泵的仿真与优化
- 作者：Weiping Zhang;Wenyuan Chen;Xiaomei Chen;Xiaosheng Wu;Zhengfu Xu
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- dynamic passive valves micropump;
- micro hydrodynamic model;
- finite element method;
- optimization;
46.Microstructures of PMMA sheet fabricated by RIE

机译：RIE制造的PMMA板的微观结构
- 作者：LongWang Huang;ChunSheng Yang;GuiFu Ding
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- PMMA;
- RIE;
- microstructure;
- sidewall passivation;
47.A micro mobile robot system for inspection between pipes

机译：用于管道之间检查的微移动机器人系统
- 作者：Faming Liu;Jiapin Chen;Jianghua Liu;Junshi Cheng;Chen Zhang
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- microrobot;
- micromotor;
- MEMS;
- inspection;
- pipe;
- control;
48.Structural Design of Novel Low-Actuation MEMS Switches for X-band Application

机译：X波段应用的新型低致动MEMS开关的结构设计
- 作者：Wei-Bin Zheng;Qing-An Huang;Fu-Xiao Li
- 会议名称：《Conference on MEMS/MOEMS technologies and applications》 | 2002年
- corrugated membrane;
- MEMS;
- switch;
- finite element analysis;
- X-band;