Self-Assembled Single-digit micro-display on plastic

摘要

We present the design and construction of a micro-display consisting of independently microfabricated light emitting diodes (LEDs) and silicon transistors on unconventional substrates such as flexible plastics. The fabrication process takes advantage of self-assembly to form the display. Silicon microcomponents and AlGaAs red LEDs were microfabricated and released to form a powder-like collection of parts. A plastic template containing binding sites was independently microfabricated. Each binding site on the template consisted of a well with a shape complementary to that of the released component. Self-assembly process was conducted in a fluidic medium to allow the microcomponents to assemble in proper receptor sites on the flexible template. We showed self-assembly of both LEDs and driving circuitry for display on plastic template. We got more than 90% yield for physically positioning the parts on template, with electrical connection yield of 62%.