Design, manufacture and reliability of 2D MEMS optical switches

摘要

2D Optical switches are an ideal solution for several optical switching applications in telecommunications including optical cross-connects, reconfigurable optical add-drop multiplexers and fiber-optic protection switching and monitoring. In this paper we address aspects of the design and manufacturing of 2D MEMS based optical switches. Important design areas such as MEMS, optics, packaging and optical performance are discussed. Reliability is an extremely important aspect for all devices used in telecom systems. We will address potential reliability issues as well as their resolution and verification.