首页> 外文会议>Conference on Light-Emitting Diode Materials and Devices; 20071112-14; Beijing(CN) >A new golden bump making method for high power LED flip chip
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A new golden bump making method for high power LED flip chip

机译:大功率LED倒装芯片新的金凸点制作方法

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Nowadays, high power LED is often packaged with flip chip method. The gold bump is usually made by electroplating or gold evaporation, which cause the environment pollution and material waste. A gold wire bump manufacture technology for high power LED flip chip is described in this paper. The wire bond device is used and different bump making parameters, such as weld temperature, pressure and ultrasonic power, are optimized through experiments. At the same time, a new bump wire tail height managing process is introduced. The gold wire bump with this method height difference keep in 3 micrometers and which is convenient for flip chip. Then, rapid annealing is taken to make sure the gold wire bump has a well adherence to the wafer. At last, the bump weld result is tested and the bump invalidation is analyzed with the SEM. The bonding force between bump and wafer more than 10 grams. The flip chip high power LED with gold wire bump has low forth voltage and heat resistance. All of above proved that the gold wire bump is convenient and reliable for high power flip chip LED.
机译:如今,大功率LED通常采用倒装芯片的方法进行封装。金凸块通常是通过电镀或蒸镀金制成的,会造成环境污染和材料浪费。本文介绍了一种用于大功率LED倒装芯片的金线凸块制造技术。使用引线键合装置,并通过实验优化了不同的凸点制作参数,例如焊接温度,压力和超声功率。同时,引入了新的凸线尾部高度管理过程。用这种方法将金线凸块的高度差保持在3微米以内,便于倒装芯片。然后,进行快速退火以确保金线凸块对晶片具有良好的附着力。最后,测试了凸点焊接结果,并利用SEM对凸点失效进行了分析。凸块和晶圆之间的结合力超过10克。具有金线凸点的倒装芯片高功率LED具有低向电压和耐热性。以上所有事实证明,金线凸点对于大功率倒装芯片LED方便且可靠。

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