AFM Scanning Moire Method for Nano-Deformation Measurement

摘要

In this study, the atomic force microscope(AFM) scanning moire method is develoepd. The scanning lines in the AFM monitor are used as the reference grating. The reference grating interferes with the specimen grating, and forms a moire pattern ont eh monitor. The formation mechanism of AFM moire, the deformation measurement principle using this mehtod are described in detail. The AFM scanning moire method is used to measure the residual deformation of mica substrate after being damaged by the YAG laser, and the thermal deformation in a QFP type electronic package. The experiment results verify the feasibility of AFM scanning moire method and show its ability to measure the in-plane deforamtion in both micro-and nano-scales.