Room temperature ethanol sensors based on SnO_2 films

摘要

The results presented in this paper demonstrate the possibility of using tin dioxide films as sensitive elements for alcohol sensors. The tin dioxide films were deposited by the spray pyrolysis method on alumina subs trates as well as on n~+ porous silicon upper layer of silicon diode structures. Room temperature, under atmospheric pressure measurements of the parameters of the obtained structures revealed their high sensitivity to the mixture of ethyl alcohol vapors and air. The optimum concentration of precursor solution for precipitation of tin dioxide films and technological regimes for the deposition of tin dioxide films and formation of a porous silicon layer with appropriate thickness and porosity by electrochemical anodization were found.