Film bulk acoustic wave resonator-based ethanol and acetone sensors and methods using the same

摘要

The present invention relates generally to the detection of alcohol. The present invention relates more particularly to the film bulk acoustic wave resonator-based devices, and their use in the sensing of ethanol and/or acetone. One aspect of the invention is a method for detecting ethanol, acetone or both in a gaseous sample including: providing a film bulk acoustic wave resonator having a zinc oxide piezoelectric layer; exposing the film bulk acoustic wave resonator to the gaseous sample; determining the resonant frequency of the film bulk acoustic wave resonator; and determining the concentration of ethanol, the concentration of acetone, or both in the gaseous sample using the resonant frequency of the film bulk acoustic wave resonator.