Concentration dependence of diffusivity in polysilicon

机译：多晶硅中扩散率的浓度依赖性

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Abstract: Diffusion of phosphorus in polycrystalline silicon is carried out from POC1$-3$/ source at 1000$DGR@C for 1 hour. The diffusion profiles were obtained and were analyzed to get diffusivity as a function of concentration.!3

机译：摘要：磷在POC1 $ -3 $ /源中以1000 $ DGR @ C的温度在多晶硅中扩散1小时。获得了扩散曲线并进行了分析，以得出扩散率与浓度的关系。3

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来源
《Conf on Physics and Technology of Semiconductor Devices and Integrated Circuits》|1992年|p.445-446|共2页
会议地点 Madras(IN)
作者
M.R. Murti; Indian Institute of Technology; Madras; India; K.V. Reddy; Indian Institute of Technology; Madras; India.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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2. Determination of Thermal-Diffusivity Dependence on Temperature of YAG Single Crystals with Different Concentrations of Yb~(3+) and V~(3+) Doping Ions [J] . D. Trefon-Radziejewska, J. Bodzenta, A. Kazmierczak-Balata, International Journal of Thermophysics . 2012,第4期

机译：不同浓度的Yb〜（3+）和V〜（3+）掺杂YAG单晶的热扩散系数与温度的关系
3. Dependence of the electrical characteristics of a metal-polysilicon-metal photodetector on the morphology of polysilicon [J] . Lee Jae-Sung Journal of the Korean Physical Society . 2016,第1期

机译：金属-多晶硅-金属光电探测器的电特性对多晶硅形态的依赖性
4. Concentration dependence of diffusivity in polysilicon [C] . M.R. Murti, K.V. Reddy Conference on the physics and technology of semiconductor devices and integrated circuits . 1992

机译：多晶硅扩散率浓度依赖性
5. Historic polychlorinated dibenzo-p-dioxin and dibenzofuran (PCDD/F) concentrations in Riverside, California: Evidence of a diffuse vehicular source. [D] . Leeman, Whitney Renae. 2002

机译：加利福尼亚里弗赛德（Riverside）的历史性多氯二苯并对二恶英和二苯并呋喃（PCDD / F）浓度：弥漫性车辆污染源的证据。
6. In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films [O] . Yi-Fan Gu, Zai-Fa Zhou, Chao Sun, 2016

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7. Determination of Thermal-Diffusivity Dependence on Temperature of YAG Single Crystals with Different Concentrations of Yb3+ and V3+ Doping Ions [O] . D. Trefon-Radziejewska, J. Bodzenta, A. Kaźmierczak-Bałata, 2012

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8. Concentration Dependence of Solution Shear Viscosity and Solute Mass Diffusivity in Crystal Growth from Solutions [R] . Izmailov, A. F. , Myerson, A. S. 1995

机译：溶液中溶液剪切粘度和溶质质量扩散系数的浓度依赖性

Concentration dependence of diffusivity in polysilicon

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