In situ synchrotron X-ray reciprocal space mapping during InGaN/GaN heterostructure nanowire growth

摘要

In situ synchrotron X-ray reciprocal space mapping was carried out to investigate the evolution of lattice strain and crystal structure of InGaN/GaN heterostructure nanowires grown by molecular beam epitaxy. At the beginning of the growth, the InGaN lattice was compressively strained to that of GaN, resulting in the pseudomorphic growth. This strain started to relax at a thickness of 3 nm and fully relaxed at 9 nm. Concomitantly, polytypes consisting of the zinc-blende and wurtzite phases were formed in InGaN.