Photopatternable Electrical Conductive Ag- SU-8 Nanocomposite for MEMS/MST

摘要

Metallic nanoparticles embedded in insulating polymers have received special interest because of their ability to create materials that maintain the flexibility of polymers with the introduction of electrical properties in the metallic range. Nanoparticles suspended in a polymer matrix appear as highly porous agglomerates, similar to open cell foams and derive their conductivity through a combination of classical percolation theory and quantum tunneling[l, 2]. The small size of nanoparticles and higher surface/area to volume ratio of nanoparticle agglomerates leads to higher conductivity at lower levels of particle doping.