Real-time error compensation of coordinate measurement system using combined gratings

摘要

Abstract: This paper is concerned with enhancing the accuracy of the coordinate measurement system by compensating the Abbe error in real-time through combined gratings. This research is carried out on a 2D measuring system with a maximum moving range of 200mm $MUL 100mm. According to its structure, a mathematical model using the rigid body assumption is deduced and altogether five metrology gratings are installed along two moving axes to compensate three angel errors according to this model. A special grating subdividing system is designed to realize 200 times subdivision for each of the five gratings. Experiment shows that this system can largely raise the accuracy of the coordinate measurement device. Besides, this research is also very valuable in the upgrading of machine tools. !8