Compensation for straightness measurement systematic errors in six degree-of-freedom motion error simultaneous measurement system

摘要

The straightness measurement systematic errors induced by error crosstalk, fabrication and installation deviation of optical element, measurement sensitivity variation, and the Abbe error in six degree-of-freedom simultaneous measurement system are analyzed in detail in this paper. Models for compensating these systematic errors were established and verified through a series of comparison experiments with the Automated Precision Inc. (API) 5D measurement system, and the experimental results showed that the maximum deviation in straightness error measurement could be reduced from 6.4 to 0.9 mu m in the x-direction, and 8.8 to 0.8 mu m in the y-direction, after the compensation. (C) 2015 Optical Society of America