High-accuracy optical prismatic scanner and its application to themeasurement of large-axle angularity,

摘要

Abstract: The principle and structure of linear rectangular prismatic scanner are analyzed. The linear scanning shift-mathematic model of the scanner is derived in this paper. By analyzing, we show that if the parameters of the scanner is selected correctly, the maximum linear scanning deviation can be controlled in a small interval. The angularity measurement accuracy of large axle can reach submicrometer level. !2