Heating equipment with carbon heating tube used to activate silicon and fabricate solar cells

摘要

We have proposed a new heating systems with a lamp of carbon heating tube (CHT) for rapid thermal heating. The CHT consists of 2-μm-diameter-carbon powders with a 0.1-g weight in quartz tubes with 60-mm long and 4-mm inter diameter with a packing density of 0.08. It is heated to 1279℃ by irradiatoin of 2.45 GHz microwave at 200 W. In This paper, we report development in CHT heating system for activation of silicon implanted boron and phosphorus atoms. We also report solar cell fabrication by the CHT heating system.