Fabrication of Micro and Diffractive Optical Devices by Use of Slow Tool Servo Diamond Turning Process

摘要

In recent years it has become possible to fabricate freeform optics using multi-axes ultraprecision machines. Unlike conventional process where a single diamond tool is used to machine each individual lens one at a time, this research demonstrates the development of an innovative diamond tool trajectory which allows the entire microlens array or diffractive lens to be machined in a single operation. As compared to the conventional approach where indexing of the workpiece is difficult and unreliable, this process can be used to produce microlenses and diffractive lenses with accurate geometry and optical surface finish. Moreover, the possibility of fabricating any arbitrary shape using the same approach is also demonstrated in this research.