Development and Characterization of a High Precision Vibratory MEMS Gyroscope System with Low-Noise Integrated Readout and Control Electronics

摘要

In this work a MEMS vibratory gyroscope fabricated with a high aspect ratio technology (25:1) and high quality factorrn(Q> 90,000) in combination with an ASIC for low noise integrated readout (0.4 μV/ rtHz), control and compensationrnelectronics will be introduced. The development of the sensor system focuses on a very symmetric design of thernmechanical element as well as of the electronics excitation and detection to be able to detect capacitance changes ofrnfew aF. The angular rate sensitivity is 0.7 mV/ (°/s) at the first analog stage. Measurement results of the start-uprnbehavior drive amplitude and frequency stability as well as angular rates will be shown.