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The Effects of Process and Metallurgical Variables Upon Black Film Formation in Acid Copper Electroplating Using Phosphorized Copper Anodes

机译:工艺和冶金变量对磷化铜阳极酸性铜电镀中黑膜形成的影响

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Phosphorus containing copper anodes and chloride additions in the plating bath are employed to cause the formation of a black "protective" film on the anode surfaces during electroplating. This protective film reduces anode sludging and improves the quality and efficiency of the plating process. This paper describes tests done to characterize the best process window to optimize black film formation. Variables evaluated include phosphorus content of anodes, chloride content of the bath, and anode current density. Anode variables explored include anode purity, grain structure, and work hardening. "Best operating practice" recommendations concering these variables are suggested for the plater.
机译:在电镀过程中,采用含磷的铜阳极和在电镀液中添加氯化物以在阳极表面形成黑色的“保护”膜。该保护膜减少了阳极沉淀,并提高了电镀工艺的质量和效率。本文介绍了为表征最佳工艺窗口以优化黑膜形成而进行的测试。评估的变量包括阳极的磷含量,镀液中的氯化物含量以及阳极电流密度。探索的阳极变量包括阳极纯度,晶粒结构和加工硬化。建议使用适合这些变量的“最佳操作规范”建议。

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