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Proposal for a Universal Test Mirror for Characterization of Slope Measuring Instruments

【摘要】 The development of third generation light sources like the Advanced Light Source (ALS) or BESSY II brought to a focus the need for high performance synchrotron optics with unprecedented tolerances for slope error and micro roughness. Proposed beam lines at Free Electron Lasers (FEL) require optical elements up to a length of one meter, characterized by a residual slope error in the range of 0.1 μrad (rms), and rms values of 0.1 nm for micro roughness. These optical elements must be inspected by highly accurate measuring instruments, providing a measurement uncertainty lower than the specified accuracy of the surface under test. It is essential that metrology devices in use at synchrotron laboratories be precisely characterized and calibrated to achieve this target. In this paper we discuss a proposal for a Universal Test Mirror (UTM) as a realization of a high performance calibration instrument. The instrument would provide an ideal calibration surface to replicate a redundant surface under test of redundant figure. The application of a sophisticated calibration instrument will allow the elimination of the majority of the systematic error from the error budget of an individual measurement of a particular optical element. We present the limitations of existing methods, initial UTM design considerations, possible calibration algorithms, and an estimation of the expected accuracy.

【会议名称】 Advances in Metrology for X-Ray and EUV Optics II; Proceedings of SPIE-The International Society for Optical Engineering; vol.6704

【会议地点】San DiegoCA(US)

【作者】 Valeriy V. Yashchuk; Wayne R. McKinney; Tony Warwick; Tino Noll; Frank Siewert; Thomas Zeschke; Ralf D. Geckeler;

【作者单位】 Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA; BESSY GmbH, Albert-Einstein-Str. 15, 12489 Berlin, Germany; Physikalische-Technische Bundesanstalt Braunschweig (PTB), Bundesallee 100, 38116 Braunschweig, Germany;

【会议组织】

【会议召开年】 2007

【页码】P.9.1-9.12

【总页数】12

【原文格式】PDF

【正文语种】eng

【中图分类】TH741;

【原文服务方】国家工程技术数字图书馆

【关键词】slope measuring instrument;long trace profiler;LTP;calibration;systematic error reduction;test mirror;

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