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Recent developments on the Daresbury Laboratory long trace profiler

【摘要】 Measurements taken in 2006 using Daresbury Laboratory's long trace profiler on the BESSY PI 'round robin' mirror highlighted a high level of background noise, believed to be principally from a combination of thermal and vibration sources. In addition, long-term thermal drifts within the instrument enclosure negated the benefit of multiple passes for averaging purposes. Further static stability tests on the LPT - V demonstrated noise levels on the slope measurement to be of the order of 0.5 μrad rms over an hour long period. We will demonstrate how the addition of a secondary instrument enclosure has reduced the background noise level in comparison tests to less than 0.1 urad rms. We will detail the design of new granite supports for the translation beam and reference mirror, which are intended to minimise sources of vibration. Information will be provided regarding the replacement of the CCD detector/filter assembly and we will outline some proposed future developments.

【会议名称】 Advances in Metrology for X-Ray and EUV Optics II; Proceedings of SPIE-The International Society for Optical Engineering; vol.6704

【会议地点】San DiegoCA(US)

【作者】 A. Gleeson;

【作者单位】 STFC Daresbury Laboratory, Warrington, WA4 4AD, UK;

【会议组织】

【会议召开年】 2007

【页码】P.14.1-14.9

【总页数】9

【原文格式】PDF

【正文语种】eng

【中图分类】TH741;

【原文服务方】国家工程技术数字图书馆

【关键词】LTP;profiler;stability;temperature;vibration;

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