A Straightforward Approach to Introduce FDC-Methods for Wet-Process-Equipment

机译：为湿法工艺设备引入FDC方法的简单方法

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In this paper the benefits from introducing FDC- methods for the monitoring of wet-chemistry batch- processors will be outlined. As an example, a typical spray-process equipment shall be used to demonstrate the benefits of using fault detection and classi

机译：在本文中，将概述采用FDC方法监测湿化学批处理机的好处。例如，应使用典型的喷涂工艺设备来证明使用故障检测和分类的好处。

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来源
《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.214-217|共4页
会议地点 StresaItaly
作者
Lindner; F.; Fischer; P.; Macalka; S.;
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batch processing (industrial); fault diagnosis; preventive maintenance; process monitoring; production equipment; semiconductor device manufacture; spraying; FDC-methods; Infineon Technologies; fault classification; fault detection; preventive maintenance; process m;

机译：批处理（工业）；故障诊断；预防性的维护;过程监控；生产设备;半导体器件制造；喷涂FDC方法；英飞凌科技；故障分类；故障检测；预防性的维护;进程m;

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A Straightforward Approach to Introduce FDC-Methods for Wet-Process-Equipment

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