CMP Slurry Blending Process Optimization and Cost Improvements using Real-time Concentration Monitoring

机译：使用实时浓度监控的CMP浆料共混工艺优化和成本降低

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The approach of this study is to install a realtime concentration monitoring system in a slurry blending system with the main intention of replacing a complex auto-titration system for cost reduction and optimization of the blending process. A Swagelok CR

机译：本研究的方法是在浆液混合系统中安装实时浓度监测系统，其主要目的是替换复杂的自动滴定系统以降低成本并优化混合过程。世伟洛克CR

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来源
《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.320-325|共6页
会议地点 StresaItaly
作者
Aparece; C.D.; Wacinski; C.; Rajan; S.;
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batch processing (industrial); blending; chemical mechanical polishing; chemical sensors; chemical variables measurement; cost reduction; industrial waste; integrated circuit interconnections; integrated circuit manufacture; quality control; slurries; waste handlin;

机译：批处理（工业）；混合化学机械抛光；化学传感器；化学变量测量；降低成本;工业废料;集成电路互连；集成电路制造；质量控制；泥浆废话;

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1. CMP process optimization using alkaline bulk copper slurry on a 300 mm Applied Materials Reflexion LK system [J] . Wang Chenwei, Ma Suohui, Liu Yuling, Journal of Semiconductors . 2013,第12期

机译：在300 mm Applied Materials Reflexion LK系统上使用碱性块状铜浆进行CMP工艺优化
2. On-line iron-ore slurry monitoring for real-time process control of pellet making processes using laser-induced breakdown spectroscopy: graphitic vs. total carbon detection [J] . Louis Barrette, Simon Turmel Spectrochimica Acta, Part B. Atomic Spectroscopy . 2001,第6期

机译：在线铁矿石浆液监控，使用激光诱导击穿光谱技术实时控制制粒过程：石墨与总碳检测
3. Robust statistical calibration and characterization of portable low-cost air quality monitoring sensors to quantify real-time O 3 and NO 2 concentrations in diverse environments [J] . Sahu Ravi, Sutaria Ronak, Motghare Vidyanand Motiram, Atmospheric Measurement Techniques . 2021,第1期

机译：便携式低成本空气质量监测传感器的强大统计校准和表征，以在不同环境中量化实时O 3和2个浓度
4. CMP Slurry Blending Process Optimization and Cost Improvements using Real-time Concentration Monitoring [C] . Aparece, Carlo Dominic, Wacinski, . 2007

机译：使用实时浓度监控的CMP浆料共混工艺优化和成本降低
5. Improving fairness and throughput of a CMP processor by optimizing the utilization of the last level shared cache in real-time using a constrained-extended Kalman filter. [D] . Panday, Ashish. 2017

机译：通过使用约束扩展卡尔曼滤波器实时优化最后一级共享缓存的利用率，提高CMP处理器的公平性和吞吐量。
6. Optimized Zirconia 3D Printing Using Digital Light Processing with Continuous Film Supply and Recyclable Slurry System [O] . Waqas Ahmed Sarwar, Jin-Ho Kang, Hyung-In Yoon 2021

机译：优化Zirconia 3D打印使用连续薄膜供应和可回收浆料系统使用数字光处理
7. Supplementary material to quot;Robust statistical calibration and characterization of portable low-cost air quality monitoring sensors to quantify real-time Osub3/sub and NOsub2/sub concentrations in diverse environmentsquot; [O] . Ravi Sahu, Ayush Nagal, Kuldeep Kumar Dixit, 2020

机译：补充材料“稳健的统计校准和便携式低成本空气质量监测传感器的表征，以定量实时O _{3 ，没有_{2 浓度”}}

CMP Slurry Blending Process Optimization and Cost Improvements using Real-time Concentration Monitoring

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