Fabrication Micro-Nozzle Plates for Inkjet Print Head Using LIGA Process

摘要

This paper presents a novel LIGA-like process to fabricate the nozzle plate for matching the requirements of the 600 dpi inkjet printhead. This novel fabrication technique reduces the production cost from 100% current process to 50%. This mass production technique comprises two main technologies: Ni-Co electroforming and plastic injection molding. The nozzle plate consists ink channels, ink cavities, and nozzles for enhancing the integrity and excusing the assembly process. The dimensions of nozzle plate are 4.16mm in width and 7.3mm in length, respectively. Total thickness of micro-nozzle plates are thickness ≦ 100um(ink channels and ink cavities), and the diameter and pitch of the nozzle holes are 40±3um and 168±3 um, respectively. Straightly speaking, for being the main compositions of the 600 dpi inkjet printhead design, the above fabrication process is qualified enough and capable of yielding satisfactory results.