Magnetic Properties and Microstructure of CoCrPtNb/Cr(CrTi)/C Thin Films Sputtered on Glass Substrate at Room Temperature

摘要

CoCrPtNb/Cr(CrTi)/C films for longitudinal recording disks were deposited by magnetron sputtering apparatus on glass substrate at room temperature to obtain high coercivity and low noise media for high-density recording systems. Magnetic and structure properties of hcp-(CoCrPt):Nb granular thin films have been investigated. Cr and CrTi underlayers have been applied to improve the in-plane preferred orientation of Co alloy grains. Addition of Ti to the Cr underlayer promotes Co (10,0) in-plane orientation, using a diamond-like carbon (DLC) seedlayer promote Co (11,0). For films with CrTi underlayer and C seedlayer, Hc reaches 2950 Oe even when Mrt is 0.49memu/cm2. The correlation of the magnetic performance with film microstructure was determined using XRD and AFM characterization technique. These granular films possess good in-plane preferred orientation of magnetic moment and c-axis. It is suggested that high performance recording media can be fabricated at room temperature by using proper Cobalt alloys and multilayer structure.