Application of Megasonic Single Wafer Cleaning Technology to LSI Mass Production Line

机译：Megasonic单晶圆清洗技术在LSI大规模生产线中的应用

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

We obtained the followings in conclusion. (1) Megasonic system have wide variations on the megasonic output power among equipments (2) Megasonic power adjustment among equipments is essential for mass production use. (3) Damage measurement using photoresist coated wafer is practical method for daily QC. (4) Stabilized power supply system shows good performance on both damages and removal rate.

机译：我们得出以下结论。（1）Megasonic系统的设备之间的Megasonic输出功率差异很大（2）设备之间的Megasonic功率调节对于批量生产至关重要。（3）使用涂有光刻胶的晶圆进行损伤测量是日常质量控制的实用方法。（4）稳定的电源系统在损坏和清除率上均表现出良好的性能。

著录项

来源
《5th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS), 5th, Sep 18-20, 2000, Ostend, Belgium》|2000年|p.241-244|共4页
会议地点 Ostend(BE);Ostend(BE)
作者
Yutaka Shimada; Hiroshi Itou; Yoshiaki Ishii; Tatsumi Shirasu; Akihiro Tomozawa;
展开▼
作者单位

Hitachi Limited, Semiconductor Integrated Circuits Japan;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词

相似文献

外文文献
中文文献
专利

1. Megasonic single-wafer cleaning technology developed [J] . Electronics Today . 2009,第9期

机译：开发了Megasonic单晶圆清洗技术
2. Damage-Free Cleaning of Sub-50 nm Devices Using Directed Megasonics Technology in a Single Wafer Processor [J] . J. J. Rosato, M. R. Yalamanchili, M. J. Beck, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2005,第0期

机译：在单晶圆处理器中使用Directed Megasonics技术对50纳米以下的设备进行无损清洗
3. CO_2-dissolved water cleans for 2xnm-Node silicon devices in a single wafer megasonic system [J] . Park C.G., Sohn H. Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2013,第Null期

机译：溶解有CO_2的水清洗单个晶片兆频超声系统中的2xnm节点硅器件
4. Application of Megasonic Single Wafer Cleaning Technology to LSI Mass Production Line [C] . Akihiro Tomozawa, Tatsumi Shirasu, Yoshiaki Ishii, International symposium on ultra clean processing of silicon surfaces . 2001

机译：兆元晶圆清洗技术在LSI大规模生产线中的应用
5. Improving the Production of Highly Custom Single-stranded DNA Sequences for Applications in DNA Nanotechnology through the Development of Novel Bacteriophage-based DNA-production Methods [D] . Nafisi, Parsa M. 2018

机译：通过开发新的基于噬菌体的DNA生产方法，提高高度定制的单链DNA序列的生产，以用于DNA纳米技术
6. Electrical Design and Evaluation of Asynchronous Serial Bus Communication Network of 48 Sensor Platform LSIs with Single-Ended I/O for Integrated MEMS-LSI Sensors [O] . Chenzhong Shao, Shuji Tanaka, Takahiro Nakayama, 2018

机译：集成MEMS-LSI传感器的48个单端I / O传感器平台LSI的异步串行总线通信网络的电气设计和评估
7. Development of the Mass Production Technology for Large Scale Mn-Zn Ferrite Single Crystals [O] . Shunro Nagata, Yoshihito Tachi, Mitsuyoshi Mastusita, 2004

机译：大规模Mn-Zn铁氧体单晶的批量生产技术的开发

Application of Megasonic Single Wafer Cleaning Technology to LSI Mass Production Line

摘要

著录项

相似文献

相关主题

期刊订阅