Study on Si-based Plate Microstructure Gas Sensor Integrated with Temperature Sensor

摘要

The core of microstructure gas sensor is the micro-heating plate (MHP), which integrates the heating electrode, temperature sensor, and signal electrode on Si-based films. The Si-based plate microstructure gas sensor was fabricated by introducing Lift-off technique and laser micromachining, with a heating electrode of its linewidth of 50 μm. The Si-based electrodes were welded and encapsulated, and the relationship between temperature and power consumption was given through the temperature characteristics. Finally, the feasibility of this structure design was investigated.