首页> 外文会议>42nd international symposium on microelectronics (IMAPS 2009) >Silver Epoxy Filled Via Analysis for High Reliability RF MCM Microelectronics
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Silver Epoxy Filled Via Analysis for High Reliability RF MCM Microelectronics

机译:用于高可靠性RF MCM微电子分析的银环氧树脂填充通孔分析

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The use of thin film ceramic substrates containing laser drilled and electroplated vias attached to arnground plane with electrically conductive epoxy is a common design approach used for RF MCM’srnproducts. This construction technique requires the vias be filled or plugged with an adhesive material tornprevent the electrically conductive epoxy from flowing up through the via and onto the top surface of thernthin film substrate metallization pattern during the installation of the substrate into the housing.rnAfter completing the assembly of the RF path, the path is “tuned” to optimize output power based on thernassembled “as built” configuration. Performance characteristics are tested and reviewed for “in family”rnresults during the processing of high reliability products used in space applications. An indication ofrndegradation in RF performance was identified prior to hermetically sealing the modules during “pre-seal”rnscreening (temperature and mechanical extremes). The data suggested that the output power from thernmodules was “out of family” by comparison to the expected result.rnUtilization of a fishbone diagram resulted in several potential root cause investigations that were launchedrnin parallel to repair the RF power anomaly. The “out of family” conditions were corrected and therndegraded ground path root cause was verified. A finite element analysis of the electroplated ground viarnwas developed, mechanical and thermal testing was conducted to repeat the failure mechanism. At thernconclusion of the investigation, it was determined the via thin film metallization failed under load causedrnby the CTE of the silver epoxy used to fill the via. The failure rate was found to exceed the allowablernreliability criteria.rnAn alternate material for via plugging was selected and tested to validate that the manufacturing solutionrnmet the product life expectations.
机译:RF MCM产品使用的常见设计方法是使用薄膜陶瓷基板,该基板包含激光钻孔和电镀通孔,并通过导电环氧树脂连接到arnground平面。这种构造技术要求在通孔中填充或插入一种粘合材料,以防止导电环氧树脂在将基板安装到外壳中的过程中向上流过通孔并流到薄膜基板金属化图案的顶表面上。在RF路径中,“ RF”路径会根据组装后的“原样”配置进行“调整”,以优化输出功率。在太空应用中使用的高可靠性产品加工过程中,对性能特征进行了“家庭”测试并进行了评估。在“预密封”筛分(温度和机械极限)过程中气密密封模块之前,先确定了RF性能下降的迹象。数据表明,与预期结果相比,模块的输出功率“不属于家庭”。使用鱼骨图会导致一些潜在的根本原因调查,这些调查是并行开展的,以修复RF功率异常。纠正了“家庭外”情况,并验证了退化的地面路径根本原因。进行了电镀接地瓶的有限元分析,并进行了机械和热测试以重复故障机理。在调查的最后,确定了在用于填充通孔的环氧银的CTE引起的负载下通孔薄膜金属化失败。发现故障率超过了允许的可靠性标准。选择了用于通孔堵塞的替代材料并进行了测试,以验证制造解决方案是否达到了产品使用寿命的预期。

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