NOVEL METHOD OF PULSED LASER DEPOSITION USING LIQUID FLOW TARGET

摘要

We proposed a novel scheme for film deposition basedrnon the pulsed laser deposition. We supply the liquidrnflow as target in and pulsed laser was irradiated it.rnAblated species from the liquid-target was depositedrnon the substrate. In this method we can always obtainrnthe constant target status and we can keep film qualityrnas good for long time. First, we demonstrate tornfabricate SnO_x film using SnO_2 colloidal solution. Wernare now trying to fabricate a hydroxyapatite filmsrnsuing a colloidal hydroxyapatite solution.