Advanced Pd-Based SAW Hydrogen Sensors: Theoretical Approach

摘要

For the purpose of durable, reversible and stable hydrogen detection in air different sensitive membranes, Pd-based films, have been deposited on the SAW propagation path and tested towards various gases and ambient conditions. This acoustic structure has been theoretically analysed starting from the mechanical equation of motion and Maxwell's equations together with the boundary conditions at the free surface and at the Pd/substrate interface. The determination of the wave velocity during the exposure of the membrane to the test gas has been calculated using a numerical calculation procedure [1].