Investigation of non-linearity of gauge block interferometers

机译：量块干涉仪的非线性研究

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摘要

One fundamental source of uncertainty in accurate interferometric length measurements is the periodical non-linearity of phase detection of the interference fringes. A method for determination and the results of non-linearity measurements of two gauge block interferometers with uncertainty estimate are presented.

机译：精确干涉长度测量中不确定性的一个基本来源是干涉条纹相位检测的周期性非线性。提出了确定不确定度的两块干涉仪的非线性测量方法和结果。

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《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.286-289|共4页
会议地点 Turin(IT)
作者
A. Lassila; J. Unkuri;
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作者单位

Centre for Metrology and Accreditation (MIKES), Helsinki, Finland;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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3. Long-term study of gauge block interferometer performance and gauge block stability [J] . Andrew J Lewis, Ben Hughes, Philip J E Aldred Metrologia: International Journal of Scientific Metrology: = Internationale Zeitschrift fur Wissenschaftliche Metrologie: = Journal International de Metrologie Scientifique . 2010,第4期

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4. Investigation of non-linearity of gauge block interferometers [C] . euspen European society for precision engineering and nanotechnology International Conference, european society for precision engineering and nanotechnology . 2001

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6. Active Angular Alignment of Gauge Blocks in Double-Ended Interferometers [O] . Zdeněk Buchta, Šimon Řeřucha, Václav Hucl, 2013

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7. Uncertainty evaluation for the gauge blocks calibration using the modified DMDM gauge block interferometer [O] . V. Zivkovic, S. Zelenika, G. Stefanovic 2012

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8. Gage Block: A Program for the Calibration of Gauge Blocks [R] . Kovacich, M. R. 1969

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Investigation of non-linearity of gauge block interferometers

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