Design considerations for optimization of pull-in stability margin in electrostatic N/MEM relays

摘要

This study aims at providing guidelines for designing electrostatically-actuated microanoelectromechanical relays with a broad operating margin around the supply voltage V. Whereas it is tempting to focus mainly on minimizing the first pull-in voltage (V) in order to enable a low V, special attention should be paid to the so-called catastrophic pull-in (V), which corresponds to the movable electrode collapsing onto the actuating electrode for a sufficiently large overdrive. Based on analytical and finite element analysis (FEA) modeling, we study the dependence of a functionality margin defined as (V-V) versus the size and position of the actuating electrode with respect to the movable structure.